These errors have effects on diffractive efficiencyof DOE. 这些制作误差对衍射光学元件的衍射效率都有影响。
A Diffractive Long Trace Profiler for Large Aspherical Optics[J]. 引用该论文 李直;赵洋;李达成;肖体乔;夏绍建.
The diffractive efficiency is measured and the errors are analyzed. 测量了菲涅耳透镜的衍射效率并分析产生误差的原因。
Measurement of Diffractive Efficiency for Fresnel Microlens Arrays[J]. 引用该论文 罗风光;曹明翠;赵向军;李洪谱;李再光.
Discussing diffractive efficiency of DOEThere are alignment errors, linewidth errors and etching errors infabrication of DOE. 衍射光学元件在制作过程中，存在掩模对准、线宽和刻蚀深度等制作误差。
If it is combined with high quality reduction projecting system, the fabrication of sub-micron diffractive optical elements can be realized completely. 数字微镜如果结合高质量的高倍精缩投影光学系统，完全可实现亚微米级衍射微光学元件的制作。
